Calcium-Assisted Glass-to-Glass Bonding for Fabrication of Glass Microfluidic Devices
نویسندگان
چکیده
منابع مشابه
Examination of Glass-Silicon and Glass-Glass Bonding Techniques for Microfluidic Systems
We report here on the results of experiments concerning particular bonding processes potentially useful for ultimate miniaturization of microfluidic systems. Direct anodic bonding of continuous thin Pyrex glass of 250 pm thickness to silicon substrates gives multiple, large voids in the glass. Etchback of thick glass of 1200 pm thickness bonded to silicon substrates gives thin continuous glass ...
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ژورنال
عنوان ژورنال: Analytical Chemistry
سال: 2008
ISSN: 0003-2700,1520-6882
DOI: 10.1021/ac801059h